Description
Plasma Enhanced CVD tube furnace/PECVD system
Introduction for PECVD tube Furnace
CY-PECVD is an affordable and compact PE-CVD (Plasma Enhanced
Chemical Vapor Deposition) tube furnace system with slidable mechanism.
It consists of a 300W RF plasma generator, a 2″O.D split tube furnace and the
integrated slidable rail which allows you preheat and slide the furnace to the
sample zone in order to get your sample an instant exposure under high temperature.
This system can be updated to advanced model with optionals. It is ideal tool for the
researcher to make innovation under limited budget.
Features for PECVD Tube Furnace
· Lower temperature processing compared to conventional CVD.
· High heating & cooling rate using sliding furnace
· Film stress can be controlled by high/low frequency mixing techniques.
· Control over stoichiometry via process conditions.
· Can do a wide range of material deposition, including SiOx, SiNx, SiOxNy and
Amorphous silicon (a-Si:H) deposition.
Parameter for PECVD Tube Furnace
Split Tube furnace
|
|
Plasma RF Generator
|
|
Vacuum Flange and Fittings
|
|
Vacuum Pump
|
|
Warranty | One year limited warranty with lift time support (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the eplacement at related products below.)
|
Detailed photos of PECVD tube furnace
Slidable PECVD tube furnace/PECVD system
Zhengzhou CY Scientific Instrument Co., Ltd is mainly engaged in the research and development, design,
manufacturing and sales of equipment used in scientific researches. Independence and innovation is the
company’s tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace,
atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us.
1. Are you a manufacturer or trade company ?
Yes,you can assured that we are a professional manufacturer with full experience, and
doing business in domestic and oversea for many years.
2. We are not professional for operation and installation of your machine?
While this is not difficult to solve,our machine is easy to operate,no need to
professional training,and the instruction manual and vedio we make can teach you step by step.
What’s more,we have professional engineers , if needed we can send them to your side to solve the problem.
Also we supply online service at any time.
3. How about packaging ? if machine damaged,what should I do ?
Usually machine is packed with wooden case and standard export carton,
plywood carton or as your requirement. Before delivery we will also send you the packing photos of the goods to confirm with you. After agreed, we will deliver it.
Damage haven’t happened before, if happen,we will arrange replacement.
4. We haven’t do business before,how can I trust your company and machine ?
We have been GOLD supplier with no complaints on Alibaba.and our machine have exported to many countries all over the world
Reviews
There are no reviews yet.